Effect of Energy Density on the Target on SnO2:Sb Film Properties when Using a High-Speed Particle Separator

SnO2:Sb thin films are grown by pulsed laser deposition with high-speed particle separation on quartz-glass substrates without post-deposition annealing under different deposition conditions in the range of the energy densities on the target from 3.4 to 6.8 J/cm(2). Their optical, structural, and electrical properties are studied. It is found that the energy density on the target affects the SnO2: Sb film conductivity and transmittance. The optimum conditions of film growth by the droplet-free pulsed laser deposition method are determined. A resistivity minimum of 1.2 x 10(-3) Omega cm is observed at an energy density on the target of 4.6 J/cm(2), a substrate temperature of 300 degrees C, and an oxygen pressure of 20 mTorr in the vacuum chamber during deposition.