Journal
ACS APPLIED NANO MATERIALS
Volume 1, Issue 3, Pages 1028-1041Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsanm.7b00342
Keywords
3D-nanoprinting; computer-aided design; direct write; additive manufacturing; focused electron beam induced deposition
Funding
- U.S. Department of Energy [DE-AC05S-00OR22725]
- Department of Energy
- EPSRC [EP/M008517/1, EP/M008517/2] Funding Source: UKRI
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Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a resist-free, nanofabrication compatible, direct-write method. The basic working principles of a computer-aided design (CAD) program (3BID) enabling 3D-FEBID is presented and simultaneously released for download. The 3BID capability significantly expands the currently limited toolbox for 3D-nanoprinting, providing access to geometries for optoelectronic, plasmonic, and nanomagnetic applications that were previously unattainable due to the lack of a suitable method for synthesis. The CAD approach supplants trial and error toward more precise/accurate FEBID required for real applications/device prototyping.
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