Journal
ACTUATORS
Volume 7, Issue 1, Pages -Publisher
MDPI
DOI: 10.3390/act7010005
Keywords
compliant mechanisms; micro-/nano-manipulation; positioning; structure optimization
Funding
- National Natural Science Foundation of China [51575545]
- Macao Science and Technology Development Fund [143/2016/A, 090/2015/A3]
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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.
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