Journal
PROGRESS IN MATERIALS SCIENCE
Volume 89, Issue -, Pages 31-91Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.pmatsci.2017.04.006
Keywords
Piezoelectric; Thin film; Acoustic wave; Biosensor; Microfluidics; Acoustofluidics; Lab-on-chip; ZnO; AlN
Categories
Funding
- Innovative electronic Manufacturing Research Centre (IeMRC) through EPSRC [FS/01/02/10]
- Knowledge Transfer Partnership [KTP010548]
- EPSRC [EP/L026899/1, EP/F063865/1, EP/F06294X/1, EP/P018998/1]
- Royal Society-Research Grant [RG090609]
- Newton Mobility Grant through Royal Society [IE161019]
- NFSC
- Scottish Sensing Systems Centre (S3C)
- Royal Society of Edinburgh
- Carnegie Trust
- Royal Academy of Engineering-Research Exchange, China
- Royal Academy of Engineering-Research Exchange, India
- UK Fluidic Network and Special Interest Group-Acoustofluidics
- EPSRC Engineering Instrument Pool
- National Natural Science Foundation of China [61274037, 51302173, 61178018, 11304209]
- Zhejiang Province Natural Science Fund [Z11101168]
- Fundamental Research Funds for the Central Universities [2014QNA5002]
- NSAF Joint Foundation of China [U1630126, U1230124, U1330103]
- Ph.D. Funding Support Program of Education Ministry of China [20110185110007]
- Australian Research Council [LP150100153]
- European Commission [HEALTH-304814]
- COST Action [IC1208]
- Ministerio de Economia y Competitividad del Gobierno de Espana [MAT2010-18933, MAT2013-45957R]
- [EP/D03826X/1]
- [EP/ C536630/1]
- [GR/T24524/01]
- [GR/S30573/01]
- [GR/R36718/01]
- [GR/L82090/01]
- [BBSRC/E11140]
- Engineering and Physical Sciences Research Council [EP/C536630/1, EP/P018998/1, EP/D03826X/1] Funding Source: researchfish
- EPSRC [EP/P018998/1, EP/D03826X/1, EP/F063865/1] Funding Source: UKRI
Ask authors/readers for more resources
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flexible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and actuating applications. This paper discusses the recent development in engineering high performance piezoelectric thin films, and highlights the critical issues such as film deposition, MEMS processing techniques, control of deposition/processing parametres, film texture, doping, dispersion effects, film stress, multilayer design, electrode materials/designs and substrate selections. Finally, advances in using thin film devices for lab-on chip applications are summarised and future development trends are identified. (C) 2017 The Author(s). Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licensesiby-nc-nd/4.0/).
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available