Superconducting properties of NbTiN thin films deposited by high-temperature chemical vapor deposition

We report on the superconducting properties of Nb1-xTixN thin films of thickness similar to 10 nm, with different Ti fraction x in the range 0 <= x <= 0.5, deposited by high-temperature chemical vapor deposition. In this parameter range, we observe that the superconducting critical temperature (T-c) increases with x. We analyze the possible role played by various parameters-Debye temperature, electron-phonon coupling constant, and Coulomb pseudopotential-in determining the observed variation of T-c with x.