Ion Beam Figuring of Highly Steep Mirrors with a 5-axis Hybrid Machine Tool

Ion beam figuring (IBF) is an advanced and deterministic method for optical mirror surface processing. The removal function of IBF varies with the different incident angles of ion beam. Therefore, for the curved surface especially the highly steep one, the Ion Beam Source (IBS) should be equipped with 5-axis machining capability to remove the material along the normal direction of the mirror surface, so as to ensure the stability of the removal function. Based on the 3-RPS parallel mechanism and two dimensional displacement platform, a new type of 5-axis hybrid machine tool for IBF is presented. With the hybrid machine tool, the figuring process of a highly steep fused silica spherical mirror is introduced. The R/# of the mirror is 0.96 and the aperture is 104mm. The figuring result shows that, PV value of the mirror surface error is converged from 121.1nm to32.3nm, and RMS value 23.6nm to 3.4nm.