Journal
OPTICS EXPRESS
Volume 25, Issue 11, Pages 12926-12934Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.25.012926
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Funding
- Research Foundation Flanders (FWO) [11U2816N, FWOKAN2014001501]
- Bijzonder Onderzoeksfonds Universiteit Gent (BOF) [MRP B/11267/10]
- European Research Council (ERC) [Inspectra 7336509]
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A hybrid integration of nanoplasmonic antennas with silicon nitride waveguides enables miniaturized chips for surface-enhanced Raman spectroscopy at visible and near-infrared wavelengths. This integration can result in high-throughput SERS assays on low sampling volumes. However, current fabrication methods are complex and rely on electron-beam lithography, thereby obstructing the full use of an integrated photonics platform. Here, we demonstrate the electron-beam-free fabrication of gold nanotriangles on deep-UV patterned silicon nitride waveguides using nanosphere lithography. The localized surface-plasmon resonance of these nanotriangles is optimized for Raman excitation at 785 nm, resulting in a SERS substrate enhancement factor of 2 : 5 x 10(5). Furthermore, the SERS signal excited and collected through the waveguide is as strong as the free-space excited and collected signal through a high NA objective. (C) 2017 Optical Society of America
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