4.6 Article

Improvement of Swanepoel method for deriving the thickness and the optical properties of chalcogenide thin films

Journal

OPTICS EXPRESS
Volume 25, Issue 1, Pages 440-451

Publisher

OPTICAL SOC AMER
DOI: 10.1364/OE.25.000440

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Funding

  1. Natural Science Foundation of Zhejiang Province [LY14F050001]
  2. State Key Laboratory of Crystal Material (Shandong University) [KF1204]
  3. K.C. Wong Magna Fund in Ningbo University

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A tangencypoint method (TPM) is presented to derive the thickness and optical constants of chalcogenide thin films from their transmission spectra. It solves the problem of the abnormal value of thickness in the strong absorption region obtained by Swanepoel method. The accuracy of the thickness and refractive index is better than 0.5% by using this method. Moreover, comparing with Swanepoel method by using the same simulation and experimental data from the transmission spectrum, the accuracy of the thickness and refractive index obtained by the TPM is higher in the strong absorption region. Finally the dispersion and absorption coefficient of the chalcogenide films are obtained based on the experimental data of the transmission spectrum by using the TPM. (C) 2017 Optical Society of America

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