Journal
OPTICS EXPRESS
Volume 25, Issue 15, Pages 18165-18174Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.25.018165
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Funding
- JSPS KAKENHI [15H05428, 15K13326]
- Toray Science Foundation
- Asahi Grass Foundation
- Support Center for Advanced Telecommunications Technology Research Foundation
- New Energy and Industrial Technology Development Organization (NEDO)
- Grants-in-Aid for Scientific Research [15H03993, 15K13326, 15H05428] Funding Source: KAKEN
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We fabricated photonic crystal high-quality factor (Q) nanocavities on a 300-mm-wide silicon-on-insulator wafer by using argon fluoride immersion photolithography. The heterostructure nanocavities showed an average experimental Q value of 1.5 million for 12 measured samples. The highest Q value was 2.3 million, which represents a record for a nanocavity fabricated by complementary metal-oxide-semiconductor (CMOS)-compatible machinery. We also demonstrated an eight-channel drop filter with 4 nm spacing consisting of arrayed nanocavities with three missing air holes. The standard deviation in the drop wavelength was less than 1 nm. These results will accelerate ultrahigh-Q nanocavity research in various areas. (C) 2017 Optical Society of America
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