Journal
OPTICS COMMUNICATIONS
Volume 396, Issue -, Pages 216-220Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.optcom.2017.03.053
Keywords
Interferometry; Wavelet transform; Surface profile measurement; Phase extraction; Signal processing
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Funding
- Grants-in-Aid for Scientific Research [16H03164] Funding Source: KAKEN
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This study proposes a signal analysis technique that uses continuous wavelet transform for signal processing in a spectral domain optical coherence tomography system. Our method enables us to calculate the optical path difference simply by taking advantage of the fact that the product of the phase and wavelength becomes constant. Experimental results obtained using a pair of gauge blocks with a thickness difference of 40 mu m confirm that the repetitive measurement accuracy was 65.1 nm. A demonstration of the three-dimensional surface profile measurement indicates that the rms measurement error is 0.17 mu m.
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