Journal
OPTICS AND LASERS IN ENGINEERING
Volume 93, Issue -, Pages 164-170Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2017.02.004
Keywords
Surface profile measurement; Optical interferometry
Categories
Funding
- Beijing Natural Science Foundation [3132033, 3172024]
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With the fast development of modern science and technology, two or three-dimensional surface profile measurement techniques with high resolution and large dynamic range are urgently required. Among them, the techniques based on optical interferometry have been widely used for their good properties of non-contact, high resolution, large dynamic measurement range and well-defined traceability route to the definition of meter. A review focused on surface profile measurement techniques of optical interferometry is introduced in this paper with a detailed classification sorted by operating principles. Examples in each category are discussed and analyzed for better understanding.
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