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2018 IEEE 18TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)
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IEEE
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One of the key requirements for magnetic MEMS transducers is the CMOS compatible, rare-earth free batch fabrication of permanent magnets with large energy product. Micro-patterns of nano-structured, CoPtP permanent magnetic material with large coercivity are developed at room temperature using low cost, pulse reverse electro-deposition techniques. The demagnetization fields of the magnetic elements are minimized through optimized micro-patterned structures which enable the full integration of high performance fully integrated MEMS electromagnetic energy harvesting devices.
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