Journal
NATURE PHOTONICS
Volume 11, Issue 4, Pages 259-+Publisher
NATURE PUBLISHING GROUP
DOI: 10.1038/NPHOTON.2017.33
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Funding
- Defense Advanced Research Projects Agency PULSE programme [DARPA-BAA-12-63-FP-004]
- Gordon and Betty Moore Foundation Experimental Investigator programme in Emergent Phenomena in Quantum Systems [GBMF4538]
- National Science Foundation Science and Technology Centers (NSF STROBE) [NSF DMR-1548924]
- Ford Foundation
- National Science Foundation
- National Defense Science and Engineering Graduate Fellowship Program
- Department of Energy STTR/SBIR phase IIB Grant [DE-SC0006514]
- U.S. Department of Energy (DOE) [DE-SC0006514] Funding Source: U.S. Department of Energy (DOE)
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Coherent diffractive imaging is unique, being the only route for achieving high spatial resolution in the extreme ultraviolet and X-ray regions, limited only by the wavelength of the light. Recently, advances in coherent short-wavelength light sources, coupled with progress in algorithm development, have significantly enhanced the power of X-ray imaging. However, so far, high-fidelity diffraction imaging of periodic objects has been a challenge because the scattered light is concentrated in isolated peaks. Here, we use tabletop 13.5 nm high-harmonic beams to make two significant advances. First, we demonstrate high-quality imaging of an extended, nearly periodic sample for the first time. Second, we achieve subwavelength spatial resolution (12.6 nm) imaging at short wavelengths, also for the first time. The key to both advances is a novel technique called 'modulus enforced probe', which enables robust and quantitative reconstructions of periodic objects. This work is important for imaging next-generation nano-engineered devices.
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