Journal
2018 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS)
Volume -, Issue -, Pages 207-210Publisher
IEEE
Keywords
PMUT; AlN; piezoelectric; ultrasound; transducer
Funding
- Delta Electronics
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This study demonstrates a new surface micromachining process capable of forming AlN piezoelectric micromachined ultrasonic transducers (PMUTs) having a sloped profile. Similar to earlier curved PMUT structures, the sloped profile increases the electromechanical coupling of the piezoelectric layer, leading to a three-fold enhancement in transmission amplitude. Unlike earlier curved PMUTs which were fabricated using complicated etching processes, the process demonstrated here is a simple surface micromachining process that is compatible with mass production processes used for industrial PMUT manufacture. Moreover, the quality factor can be improved by sloped-anchor of diaphragm with less anchor-loss.
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