Journal
NANOTECHNOLOGY
Volume 28, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6528/aa5d4d
Keywords
direct laser writing; photoresists; deformations; micro-actuators; micro-sensors; diffractive optical elements; 4D printing
Funding
- Research Council of Lithuania [SEN-20/2015]
- JSPS Kakenhi [15K04637]
- NATO SPS [985048]
- Grants-in-Aid for Scientific Research [15K04637] Funding Source: KAKEN
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We investigate reversible deformations of polymeric microstructures fabricated using direct laser writing three-dimensional lithography upon immersion in various solvents. Swelling and shrinkage of sub-micrometre size features are induced by interaction with surrounding solvent and such deformations can be exploited to create larger structures whose size, shape, and other structural parameters depend on the surroundings. We describe diffractive optical elements, micro-mechanical sensors and also hybrid deformable structures, that can be used to implement micro-actuation, micro-sensing, and other functionalities highly sought for micro-optical, micromechanical, and micro-fluidic systems.
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