Growth of nanotubes using IC-PECVD as benzene carbon carrier

The main objective of this journal paper is to grow vertically aligned carbon nanotubes (CNTs) by using the method of inductively coupled plasma enhanced chemical vapor deposition (IC-PECVD) and to study their pattern of growth and specific properties. Benzene was tested in combination with Ni film as well as ferrocene in solution as catalyst to grow nanotubes. Different substrates were also used to check the effects of substrate on the synthesis of nanotubes. Various conditions and parameters were used for the synthesis purpose. Results obtained with benzene were promising for the formation of vertically aligned carbon nanotubes in the investigated parameter range. Results has been confirmed using SEM (scanning electron microscope), EDX (energy-dispersive X-ray) and Raman spectroscopy.