Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 24, Issue 10, Pages 3973-3976Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00542-017-3562-y
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- Ministry of Science and Technology [MOST 106-2221-E-150-041-MY3, 106-2622-E-150-005-CC3, 106-2622-E-150-017-CC2]
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Carbon nanotubes (CNTs) have been demonstrated to be one of the most interesting materials for gas sensing. This study applies a simple method for the direct transfer of high-density CNTs from a SiO2/Si substrate to a flexible substrate for acetone gas sensing at room temperature. The flexible gas sensor exhibited high sensitivities of 4.63% at room temperature for ambient acetone gas concentrations of 800 ppm, respectively. In addition, the gas response of the CNT-based chemiresistor is attributed to p-type conductivity in the Au-modified semiconducting CNTs. Very good repeatability of the sensor response to gas concentration is demonstrated, representing a major step toward the low-cost large-scale production of this class of device.
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