Journal
MICROELECTRONIC ENGINEERING
Volume 174, Issue -, Pages 52-58Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2017.01.004
Keywords
Thermo-plasmonics; Electroless deposition; Silver nanoparticles; Surface enhanced thermo lithography; Polyphthalaldehyde (PPA) polymer
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Funding
- Ministry of Health, Italy [GR-201s0-2320665]
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We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry. (C) 2017 Elsevier B.V. All rights reserved.
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