Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 62, Issue -, Pages 180-191Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2016.11.006
Keywords
Gallium Nitride; Indium Nitride; Aluminium Nitride; Semiconductors; Doping; Conductivity
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Funding
- Science Foundation Ireland [SFI/10/1N.1/12993, SFI/07/EN/E001A]
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In this review paper we will report the current state of research regarding the doping of III-nitride materials and their alloys. GaN is a mature material with both n-type and p-type doping relatively well understood, and while n-GaN is easily achieved, p-type doping requires much more care. There are significant efforts to extend the composition range that can be controllably doped for AlGaInN alloys. This would allow application in shorter and longer wavelength optoelectronics as well as extending power electronic devices. It is found that doping of AlGaN and InGaN alloys with low-gallium-content has particular challenges, especially for p-materials and these issues are described.
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