Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 70, Issue -, Pages 234-238Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2016.10.013
Keywords
Delafossite oxides; CuCrO2; C-Face sapphire substrate; Reactive RF magnetron sputtering; Stoichiometry; Optical transmittance
Categories
Funding
- Japan Society for the Promotion of Science (JSPS) KAKENHI [16J01620]
- Grants-in-Aid for Scientific Research [16J01620] Funding Source: KAKEN
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Reactive sputtering, with Ar/N-2 mixture gas was introduced to improve stoichiometry of p-type transparent CuCrO2 films, and effects of N-2 partial pressure ratio (alpha(N)) on optical and structural properties were investigated. Film composition was changed from Cu rich (i.e. Cr poor) to Cr rich (i.e. Cu poor) by N-2 addition, and the stoichiometric film was grown at aN of about 20%. Although N atoms were not incorporated into the films from analyses of crystal structure and chemical bonding state, both transmittance from visible to near-infrared wavelength and crystallinity were improved at aN up to 10%. These improvements were attributed to suppression of the CuO formation and promotion of the O-Cu-O dumbbell bonds formation. This was confirmed by the decrease of diffraction intensity from CuO and the increase of vibrational intensity corresponding A(1g) mode. From these results, it can be considered that N atoms decreased not only Cu but also excess O in the, film. At aN of 20% or above, transmittance at wavelength of 450 nm and crystallinity deteriorated. This is supposed that excessive N-2 addition probably generated both O and Cu deficiencies. As a result, it was found that slightly Cu-rich composition is suitable to obtain high-transparency CuCrO2 thin films for practical use.
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