4.7 Article

Dependence of the structure and orientation of VSS grown Si nanowires on an epitaxy process

Journal

CRYSTENGCOMM
Volume 21, Issue 29, Pages 4298-4304

Publisher

ROYAL SOC CHEMISTRY
DOI: 10.1039/c9ce00539k

Keywords

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Funding

  1. Ministry of Science and Technology of Taiwan [MOST-107-2636-M-009-002]
  2. Center for the Semiconductor Technology Research from The Featured Areas Research Center Program
  3. Ministry of Science and Technology, Taiwan [MOST-108-3017-F-009-003]

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We investigated the vapor-solid-solid growth of Si nanowires from Ni silicides on Si(111), Si(110), and GaN substrates. The morphology and structures of Si on these substrates are distinct, and are dependent on substrate lattices and an epitaxy process during growth. The sidewall facets and epitaxy of silicides and Si were discussed. In addition, Si grown on GaN nanowires was investigated which led to the formation of branched nanowire structures. The Si nanowires/nanodots lie on the surface of GaN nanowires to maintain lower system energy. We manipulated the whole process in a UHV and studied the crystal growth of Si on different lattice substrates. Meanwhile, the process which occurred in a non-UHV led to less regularity on the NiSi2 crystal facets and interface epitaxy between NiSi2 and Si nanowires.

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