4.4 Article

Cross Sections for Electron Collisions with NF3

Journal

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.5000687

Keywords

electron collisions; total cross sections; ionization; dissociation; attachment; evaluation

Funding

  1. National Research Council of Science and Technology (NST) by Korea government (MSIP) [PCS-17-05-NFRI]
  2. Chungnam National University
  3. National Science Foundation [PHY-15-06391]
  4. National Science Center in Poland [2014/15/D/ST2/02358]
  5. National Research Council of Science & Technology (NST), Republic of Korea [PCS-17-05-NFRI] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
  6. Division Of Physics
  7. Direct For Mathematical & Physical Scien [1506391] Funding Source: National Science Foundation
  8. Science and Technology Facilities Council [1353011] Funding Source: researchfish

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Cross section data are compiled from the literature for electron collisions with nitrogen trifluoride (NF3) molecules. Cross sections are collected and reviewed for total scattering, elastic scattering, momentum transfer, excitations of rotational and vibrational states, dissociation, ionization, and dissociative attachment. For each of these processes, the recommended values of the cross sections are presented. The literature has been surveyed until end of 2016. (C) 2017 AIP Publishing LLC for the National Institute of Standards Technology.

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