Journal
ACS APPLIED ELECTRONIC MATERIALS
Volume 1, Issue 7, Pages 1070-1075Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.9b00281
Keywords
electrochemical nanoimprinting; metal-assisted chemical-etching; silicon nanostructures; master stamp
Funding
- National Key Research and Development Program of China [2017YFA0206002]
- National Natural Science Foundation of China [61804169, U1832217, 61875225, 61821091, 61774166]
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We demonstrate an electrochemical nanoimprinting process-termed as Mac-Imprint-to produce different silicon nanostructures. A master stamp featuring high-aspect-ratio nanostructures with Ta film as the blocking layer and Au nanostructures as the catalyst is realized by electron-beam lithography followed by Au electroplating. In particular, we investigate the generated monocrystalline silicon nanostructure characteristics and realize a 20 nm minimum feature size. Moreover, we demonstrate the creation of structural color image of a rooster with an average pixel size of 300 nm (similar to 42 000 dpi). Our results suggest that such a simple process has prospective applications ranging from optoelectronics to luminescent devices.
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