Journal
ACS APPLIED ELECTRONIC MATERIALS
Volume 1, Issue 5, Pages 752-763Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.9b00099
Keywords
lithographic editor; electrochemical etching; hydrogel; device fabrication; microphoto-detector
Funding
- National Science Foundation [CHE 0748676, CHE 0959568, DMR 1757954]
- National Institutes of Health [GM 106364]
- NSF-REU award [DMR 1757954]
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Electrochemical erasing of conductive coatings at microscale for the fabrication of functional devices on flexible and hard surfaces is demonstrated. The nanoporous pyramidal-shaped nano-and microscale polyacrylamide hydrogel PLE probes allowed delivery of electrochemical etchants to the surface, providing ondemand maskless patterning at microscale. Highly efficient erasing (silver and copper metals erasing efficiency approximate to 100%), areal erasing rate approximate to 80 mu m 2/s, and pressure dependent spatial erasing feature dimensions between 3 mu m to many tens of microns on metal surfaces allowed for the fabrication of microelectrodes of various geometries. Overall, PLE-based microscale erasing allowed for rapid and accessible fabrication of organic electron-hole carrier pair-based microphotodetector, as well as the assembly of LED on flexible and rigid ITO substrates.
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