Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 26, Issue 2, Pages 351-356Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2016.2642580
Keywords
Harsh environments; passive wireless sensor; LTCC; dual LC resonant circuit
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Funding
- National Natural Science Foundation of China [61471324, 51425505]
- Outstanding Young Talents Support Plan of Shanxi Province
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This paper presents a passive wireless sensor for simultaneously and remotely measuring pressure and temperature under harsh environments. The sensor consists of a dual LC (inductor and capacitor) resonant circuit, one without a cavity and the other with a cavity capacitor for temperature and pressure sensing, respectively. The low-temperature co-fired ceramic technology is used to fabricate the sensor, making it suitable for high-temperature harsh environment operations. Experimental results show the prototype sensor has temperature sensitivity of 8.15 kHz/degrees C and pressure sensitivity of 1.96 MHz/Bar up to 400 degrees C.
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