Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 26, Issue 1, Pages 95-101Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2016.2613877
Keywords
Inkjet-printing; microelectromechanical systems; relays; printed electronics
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Funding
- Philippine California Advanced Research Institutes (PCARI)
- National Creative Research Laboratory program - Korean Ministry of Science, ICT & Future Planning [2012026372]
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We report a high-speed inkjet-printed three-terminal microelectromechanical(MEM) relay with a doubleclamped beam that exploits the enhanced stiffness of the double-clamped structure to improve electrical performance. To minimize mechanical delay and pull-in voltage, the contact gap between the channel-beam and drain, and the stiffness of the beam and shape of the drain was carefully designed and optimized through a 3-D finite element simulation. The double-clamped beam prevents stiction-related failure between the channel-beam and drain despite the contact gap being only 370 nm for a > 500 mu m long beam. The resulting printed relay delivers a turn-ON delay of 8 mu s at a gate voltage of 10 V, a pull-in voltage of only 7.2 V, immeasurable off-leakage, excellent subthreshold swing, and a small hysteresis window of 2 V without any bending or collapsing of the beam. The device also shows reliable operation over 105 cycles while maintaining a high ON/OFF ratio of 108, and extremely low ON-state resistance
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