4.5 Review

Hetero-epitaxy of high quality germanium film on silicon substrate for optoelectronic integrated circuit applications

Journal

JOURNAL OF MATERIALS RESEARCH
Volume 32, Issue 21, Pages 4025-4040

Publisher

SPRINGER HEIDELBERG
DOI: 10.1557/jmr.2017.324

Keywords

epitaxy; bonding; optoelectronic

Funding

  1. National Research Foundation Singapore through the Singapore MIT Alliance for Research and Technology's Low Energy Electronic Systems (LEES) IRG
  2. SMART Innovation Center
  3. Silicon Technologies Center of Excellence (Si-COE)
  4. SMA3 Fellowship
  5. silicon photonics group, Optoelectronics Research Center at the University of Southampton
  6. [NRF-CRP12-2013-04]

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Integration of photonic devices on silicon (Si) substrates is a key method in enabling large scale manufacturing of Si-based photonic-electronic circuits for next generation systems with high performance, small form factor, low power consumption, and low cost. Germanium (Ge) is a promising material due to its pseudo-direct bandgap and its compatibility with Si-CMOS processing. In this article, we present our recent progress on achieving high quality germanium-on-silicon (Ge/Si) materials. Subsequently, the performance of various functional devices such as photodetectors, lasers, waveguides, and sensors that are fabricated on the Ge/Si platform are discussed. Some possible future works such as the incorporation of tin (Sn) into Ge will be proposed. Finally, some applications based on a fully monolithic integrated photonic-electronic chip on an Si platform will be highlighted at the end of this article.

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