Optimization and parametric study of AC electroosmotic micropumping by response surface method

Alternative current electroosmotic micropumps (ACEO) have gained a great interest in microfluidics research due to their low operating potential. In this paper, a parametric study is performed on various geometrical parameters of an ACEO micropump design. The problem is modeled and solved numerically using COMSOL Multiphysics. This micropump relies on the grouping of a periodic electrode array in terms of the applied voltage to create asymmetries in the electrode configuration. The pumping velocity is obtained and investigated for various geometry designs. In addition, the optimal parameters are obtained by employing the response surface methodology (RSM). The RSM could predict the effects of different factors affecting the performance of the system and their interactions. The most important parameters affecting the pumping velocity are identified. It is shown that the pumping velocity is controllable. Three various micropump designs with different cost to benefit ratios are presented. These designs are different due to their fabrication cost and the pumping velocity.