Journal
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 243, Issue -, Pages 299-311Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jmatprotec.2016.12.032
Keywords
Nd:YAG laser; Laser processing; Micromachining; Single-crystal diamond; Thermal ablation; Groove formation; Surface microstructure
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Micro-grooves were machined onto a single-crystal diamond surface by laser irradiation with a nanosecond pulse, and the resulting damage was investigated. The causes of four different forms of damage have been identified and examined; cracking, ripple formation, groove shape deformation and debris deposition. Cracking is caused by a rapid temperature change; ripples by interference of the laser reflected from the groove walls; groove shape deformation by enhanced absorption of the laser-induced plasma; deposited ablation debris by two different ablation regimes. Cracking and shape deformation is reduced at the center of the groove, which is very smooth and ripple-free for line irradiations using a single pass. These results provide useful information for reducing the laser-induced damage in diamond and creating damage-free micro-grooved diamond cutting tools. (C) 2016 Elsevier B.V. All rights reserved.
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