Journal
NANOTECHNOLOGY REVIEWS
Volume 8, Issue 1, Pages 293-298Publisher
WALTER DE GRUYTER GMBH
DOI: 10.1515/ntrev-2019-0028
Keywords
Extrinsic Fabry-Perot interferometer; vibration sensor; fiber optical sensor; femtosecond laser micromachining
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Funding
- National Key R&D Program of China [2018YFB1107200]
- National Natural Science Foundation of China (NSFC) [61775020, 61575021]
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An on-fiber extrinsic Fabry-Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80um and a cantilever thickness of 5 mu m, is created perpendicular to the fiber axis by using the femtosecond laser micromachining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.
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