Journal
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
Volume -, Issue -, Pages 628-631Publisher
IEEE
DOI: 10.1109/memsys.2019.8870865
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Funding
- National Natural Science Foundation of China [51875521]
- Science Fund of Creative Research Groups of National Natural Science Foundation of China [51521064]
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This paper presents a human respiratory monitoring sensor based on an AlN resonant microcantilever coated with graphene oxide (GO). The sensor shows great performance in stability and repeatability. A closed-loop respiratory measurement system with fast response, and reliability is realized. The closed-loop system increases the sensor response time by more than 3 times. The whole system can provide real-time, ambulatory human respiratory monitoring. The sensor has advantages of small size and low cost for the low dependence on large peripherals, and can be integrated on a breathing mask to form a wearable sensing system.
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