Journal
Publisher
IEEE
DOI: 10.1109/transducers.2019.8808775
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This paper presents a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) array targeting mid-air haptic feedback applications. Compared to existing bulk ultrasound transducer technologies, this array implements polymer-based micromachined ultrasound transducers fabricated in a display-compatible, large area technology. It is, thus, good candidate for direct integration on top of large displays and allows to fabricate dense PMUT arrays for a fine non-contact haptic experience at interesting price point.
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