Journal
Publisher
IEEE
DOI: 10.1109/transducers.2019.8808741
Keywords
MEMS microphone; High performance; Vacuum; Capacitive transduction; Hinge mechanism
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In this paper, we present the design, fabrication and first experimental results of a microscalc hinge mechanism allowing the mechanical transfer of a force between two atmospheres. When applied to the design of a capacitive MEMS microphone, this mechanism allows the division of the device into two separate parts: a pressure harvesting membrane in air, linked to a capacitive transducer sitting in vacuum. Theoretically, this separation should result in very low acoustical and mechanical noises, thereby increasing overall microphone performance (estimated SNR>75dB(A)), while maintaining a small device footprint (<2mm(2))
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