Journal
Publisher
IEEE
DOI: 10.1109/transducers.2019.8808821
Keywords
UV-nanoimprint lithography; silicon nanopillars; piezoresistive microcantilever; ZnO nanorods; ethanol detection; room temperature; nanofabrication
Funding
- China Scholarship Council (CSC) [201506300019]
- Niedersaehsisehes Vorab, Germany, through the Quantum-and Nanometrology (QUANOMET)
- Ministry of Research, Technology and Higher Education of the Republic of Indonesia (RISTEKDIKTI) [343/RISET-Pro/FGSNIII/2016, 8245-ID]
- European Research Council [336917]
- European Research Council (ERC) [336917] Funding Source: European Research Council (ERC)
Ask authors/readers for more resources
This paper reports a self-actuating and self-sensing gravimetric ethanol sensor, based on 3D ZnO-Nanorods@Si-Nanopillars (ZnO-NRs@Si-NPLs) as the sensing material which, for the first time, are selectively fabricated on a piezoresistive silicon microcantilever (MC, Fig. 1). This novel ZnO-NRs@Si-NPLs functionalized microcantilever (MC) was found to be highly sensitive to ethanol detection at room-temperature, with a sensitivity of hundred times higher than that of a ZnO-nanofilm-covered MC. Furthermore, fast response and recovery time of few seconds to low-concentration ethanol can be expected. In addition, real-time sensing is possible using a low-cost, low-weight, miniaturized phase-locked-loop (PLL) based system, indicating the potential of our proposed sensor for future portable gas-sensing in practical applications.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
