Journal
9TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2019)
Volume 2147, Issue -, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.5123843
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- German Federal Ministry for Economic Affairs and Energy [03225877D (PROJECT PEPPER), 020E41V7904]
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This paper discusses how differently grown ultra-thin interfacial oxide of poly-Si based passivating contacts correspond to high-temperature annealing as well as its sensitivity to hydrogenation. It will be shown on symmetrical lifetime samples that tunnel oxide passivating contacts (TOPCon) featuring thermally grown interfacial oxide layer allow a higher optimum annealing temperature than those with thin wet-chemically grown oxides. These TOPCon structures can yield an excellent passivation quality with up to 741 mV iV(oc) and 88% iFF. Moreover, TOPCon samples annealed at low temperatures benefit more strongly from a subsequent hydrogenation process.
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