CFD coupled kinetic modeling and simulation of hot wall vertical tubular reactor for deposition of SiC crystal from MTS

Chemical Vapor Deposition (CVD) process is generally carried out in a hot wall reactor of vertical or horizontal type keeping the substrate inside the chamber on which deposition is targeted. Present study is focused to explain the role of hydrodynamics and temperature conditions on the overall coating rates inside a hot wall vertical tubular reactor. Deposition of beta-Silicon Carbide crystals from Methytricholorosilane catalyzed by hydrogen is modeled here considering growth kinetics which can be successfully described - using only two steps. Finite Element Method based simulation is performed to obtain the flow and temperature profiles inside the hot wall reactor. Model equations for kinetics are derived in differential form based on mass balance considering transport of species. Kinetic parameters were approximated comparing the experimentally found coating rates as reported earlier. Present model is seen to fit reasonably well for the wide variation of gas flow rates as well as temperature. Apart from the flow rates of total fluid at inlet and initial wall temperature of reactor, sample position and the inlet diameter of the reactor are found to be key important parameters for the desired coating to take place. Model prediction thus can provide better knowledge in order to carefully choose process parameters in designing the reactor for achieving optimized deposition rates by CVD with desired properties. (C) 2017 Elsevier B.V. All rights reserved.