4.4 Article

Compositionally graded InGaN layers grown on vicinal N-face GaN substrates by plasma-assisted molecular beam epitaxy

Journal

JOURNAL OF CRYSTAL GROWTH
Volume 465, Issue -, Pages 55-59

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2017.02.037

Keywords

Crystal morphology; Atomic force microscopy; X-ray diffraction; Molecular beam epitaxy; Nitrides; Semiconducting indium compounds

Funding

  1. Center for Low Energy Systems Technology (LEAST), one of the six centers of STARnet, an SRC program - MARCO
  2. DARPA [2013-MA-]
  3. Solid State Lighting and Energy Electronics Center (SSLEEC) at UCSB
  4. program UCSolar
  5. NSF MRSEC program [DMR-1121053]
  6. NSF
  7. German Research Foundation [INST 272/148-1]
  8. Collaborative Research Center Semiconductor Nanophotonics: Materials, Models, Devices [SFB 787]

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This work reports on compositionally graded (000 (1) over bar) N-polar InxGa1-xN layers. The InGaN grades with different final In compositions x(f) up to 0.25 were grown by plasma-assisted molecular beam epitaxy on vicinal GaN base layers with a miscut angle of 4 degrees towards the m-direction. When increasing x(f) the surface morphology evolved from an interlacing finger structure, attributed to the Ehrlich-Schwfibel effect, towards fully strain-relaxed columnar features. Regardless of the crystal morphology and the strain state each graded sample exhibited a bright photoluminescence signal at room temperature spanning the whole visible range. Cross-sectional nanoscale cathodoluminescence evidenced a red-shift of the luminesced signal from 420 to 580 nm along the grade and also showed strong lateral emission inhomogeneities. (C) 2017 Elsevier B.V. All rights reserved.

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