Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 726, Issue -, Pages 514-524Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2017.08.024
Keywords
Mechanical chemical grinding; Ceria; Silicon; Transmission electron microscopy; X-ray diffraction
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Funding
- Thousand Youth Talents at Dalian University of Technology
- Natural Science Foundation of Jiangsu Province [BK20151190]
- Distinguished Young Scholars for Science and Technology of Dalian City [2016RJ05]
- Excellent Young Scientists Fund of NSFC [51422502]
- Science Fund of Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences [2017K02]
- Collaborative Innovation Center of Major Machine Manufacturing in Liaoning
- Integrated Program for Major Research Plan of NSFC [91323302]
- Science Fund for Creative Research Groups of NSFC [51621064]
- Changjiang Scholars Program of Ministry of Education of China
- Tribology Science Fund of State Key Laboratory of Tribology, Tsinghua University [SKLTKF14A03]
- Science Fund of the State Key Laboratory of Metastable Materials Science and Technology, Yanshan University [201501]
- Xinghai Science Funds for Distinguished Young Scholars at Dalian University of Technology
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In this study, two diamond wheels are newly developed. A novel approach of mechanical chemical grinding (MCG) is proposed using the diamond wheel (C2) with ceria (CeO2) developed. A uniform wear layer of 48 nm in thickness is obtained on a silicon (Si) wafer ground by the C2 at a feed rate of 12 mu m/min, which is less than one third that formed by a conventional diamond wheel with mesh size of 5000. The uniform wear layer consists of a 40 nm amorphous layer at the top and an 8 nm damage crystalline layer beneath. Si, silica (SiO2) and SiOx are identified on all the ground Si wafers by energy dispersive spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy and Raman spectra. Only CeO2 and diamond are confirmed by XRD on the C2, indicating the perfect vitrified effect. CeO2, diamond and amorphous carbon are discerned by Raman spectra on the C2 at 466,1332 and 1430 cm(-1), respectively. (C) 2017 Elsevier B.V. All rights reserved.
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