Journal
ACS APPLIED ELECTRONIC MATERIALS
Volume 2, Issue 5, Pages 1193-1202Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsaelm.9b00767
Keywords
hexagonal boron nitride; dielectric spectroscopy; complex permittivity; hydrogenation; microwave hydrogen plasma
Funding
- Engineering and Physical Sciences Research Council under the program Grant GaN-DaME [EP/P00945X/1]
- European Research Council (ERC) Consolidator Grant SUPERNEMS [647471]
- UCL [PR16195]
- EPSRC [EP/P00945X/1] Funding Source: UKRI
- European Research Council (ERC) [647471] Funding Source: European Research Council (ERC)
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Hexagonal boron nitride (h-BN) is a critical material for 2D electronic devices and has attracted considerable attention owing to its structural similarity to graphene. However, it is a dielectric and modifying its electrical properties is a challenge. Hydrogenation has been calculated as a potential method, although it is rarely experimentally measured. Here, dielectric spectroscopy of hot-pressed h-BN after various hydrogen treatments has been investigated. Untreated h-BN showed a frequency-independent dielectric constant (4.2 +/- 0.2) and an immeasurably low dielectric loss factor, demonstrating the ideal dielectric nature of h-BN across the 10(3) to 10(10) Hz range. However, hydrogen plasma (H+) treatment in a microwave chemical vapor deposition (CVD) reactor amplified the complex permittivity dramatically, introducing Havriliak-Negami type dispersion (epsilon(s) approximate to 20 +/- 2, epsilon(infinity) approximate to 4.2 +/- 0.2) and a percolating long-range conductivity (similar to 0.32 mS/m). Annealing in molecular hydrogen (H-2) at similar CVD temperatures showed minimal impact, implying that H-2 diffusion is not the cause. Oxygen plasma treatment, however, removes the percolating conductivity but the Debye mechanism remains. This leads to the conclusion that the electrical conductivity of h-BN ceramics can be modified through hydrogenation, using atomic hydrogen. The potential as a tunable wide-band gap semiconductor is highlighted however for insulating dielectric substrate applications; microwave CVD may destroy these desirable properties.
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