Journal
IEEE SENSORS JOURNAL
Volume 20, Issue 16, Pages 9029-9037Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2020.2987971
Keywords
High-g; MEMS accelerometer sensors; packaging method; package technology accelerometers
Funding
- National Natural Science Foundation of China [51705477, 61603353, 61703098]
- Pre-Research Field Foundation of Equipment Development Department of China [61405170104]
- Program of the Top Young Academic Leaders of Higher Learning Institutions of Shanxi
- Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province
- Shanxi Province Science Foundation for Youths [201801D221195]
- Key Research and Development (R&D) Projects of Shanxi Province [201903D111005]
- Young Academic Leaders of North University of China [QX201809]
- Weapons and Equipment Joint Fund [6141B021304]
- Shanxi Province Patent Promotion and Implementation Program of Shanxi Province [2019025]
- Fund for Shanxi 1331 Project Key Subjects Construction
Ask authors/readers for more resources
High-G MEMS accelerometer (HGMA) has applications in aerospace, explosive and penetrative environments, and so on. Reliable encapsulation is the basis of ensuring the survival and function of the sensor in harsh environments, but complete high-g accelerometer sensor encapsulation models are rarely reported. We use a multiple-degree-of-freedom-system and the theory of stress wave interface transfer to design and analyze three different packaging methods for high-g accelerometer sensors. We also determine the best encapsulation method by establishing natural frequency calculation and stress wave transfer models between media. The stress wave reflection ability of patch adhesive is verified with a split Hopkinson pressure bar (SHPB). The results indicate that the unloading efficiency of patch adhesive to the stress wave is up to 95%. The HGMA frequency response is greater than 300 kHz, which was measured by a single Hopkinson rod. The anti-impact performance and the measurement accuracy in the ultra-high overload environment of the high-g acceleration sensor were verified by artillery penetration tests. The results show that the sensor can realize high precision measurements under ultra-high overload environments (the measuring accuracy of the sensor under the impact of 200,000 g is better than 5%).
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available