Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 94, Issue 9-12, Pages 3503-3517Publisher
SPRINGER LONDON LTD
DOI: 10.1007/s00170-017-1166-4
Keywords
Fast tool servo; Microstructure; Ultra-precision machining; Flexure; Hysteresis model
Funding
- Natural Science Foundation of China [5160051494, U1601202]
- Science and Technology Program of Guangzhou [201510010058]
- Natural Science Foundation of Guangdong [2014A030310204]
- Guangdong General Programs for Science and Technology [2015A010104009, 2015B010104008, 2015B010133005]
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Ultra-precision fast tool servo (FTS) machining technology is an effective method for complex surface microstructure machining. However, as for a single degree-of-freedom FTS, it can only achieve a high-rate reciprocating movement in one direction; thus, it cannot realize ultra-precision machining for some complex microstructural surface. Therefore, a novel flexure-based fast tool servo device composed of two platforms and three branched chains is proposed in this work, which aims to realize a robotic ultra-precision machining with XYZ translational precision motion. Each of the branched chain is made up of a prismatic pair, two hook hinges, and a connecting rod. The FTS mechanism design and modeling are carried out firstly; then, the FTS device characterization in terms of statics analysis and modal analysis is conducted; in order to suppress the hysteresis nonlinearity and improve the positioning precision, a new repetitive-compensated PID controller combined with an inverted modified Prandtl-Ishlinskii model is proposed to handle this issue. It indicates that the displacement amplification ratio is 3.87; thus, the workspace can reach to [- 85, 85]a[- 80,80]a[0,120]mu m(3), and the closed-loop positioning precision is 600 nm, which will be considered to fulfill practical FTS machining tasks.
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