Journal
NANOSCALE
Volume 12, Issue 41, Pages 21401-21408Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/d0nr05546h
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Funding
- MOST of China [2016YFA0200601]
- NSFC [21633005, 21621091, 21804061, 21790354]
- Fundamental Research Funds for Chinese Central Universities [lzujbky-2019-ct05]
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We introduce a highly efficient method for the fabrication of large area nanobowtie arrays (NBAs) based on a home-built tunable holographic lithography (THL) technique. By elaborately designing pattern templates, NBAs with different materials and geometric parameters can be easily obtained by a two-step approach. Both the plasmonic and semiconductor NBAs with tunable gap sizes and a high uniformity over an area of one square centimetre can be conveniently fabricated. Surface-enhanced Raman spectroscopy (SERS) performance and photoelectric properties have been demonstrated on the gold and TiO2 NBAs, respectively. This THL technique shows unique advantages in fabricating well-defined and large-area nanostructures in a high throughput way, facilitating practical applications in a broad range of fields of optoelectronics.
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