4.4 Article

Reliability Characteristics and Mechanisms of HRL's T3 GaN Technology

Journal

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 30, Issue 4, Pages 480-485

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TSM.2017.2748921

Keywords

GaN HEMT; MMIC; reliability; life test

Funding

  1. Boeing

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HRL's T3 GaN MMIC technology is evaluated using dc reliability experiments, including a voltage step-stress test, a temperature step-stress test, and a 3-temperature life test. The drain voltage step-stress test revealed three distinct regions of operation through gate leakage characteristic changes: burn-in stabilization up to 5 V, followed by stable operation up to 20 V, then voltage-dependent degradation up to catastrophic failure around 30 V. As a result, a de-rated recommended safe-operating limit of V-ds = 12 V was established. The temperature stepstress test resulted in clear Arrhenius temperature-dependent degradation of the device on-resistance above 250 degrees C. Similarly, a recommended safe-operating limit of 150 degrees C was established for the technology. Finally, the 3-temperature life test resulted in clear temperature group separation and an activation energy of 2.52 eV, with a mean time-to-failure of 4 million hours at 150 degrees C with only a +0.2 ohm. mm increase in device on-resistance. Physical failure analysis of degraded parts showed the mechanism was a defect formation in the epitaxial barrier layer at the drain edge of the gate. Finite-element electrical simulations duplicated this degradation mechanism by modeling the defect as a void, which depleted the 2DEG and therefore increased device on-resistance.

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