Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 64, Issue 8, Pages 3368-3376Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2017.2708129
Keywords
Acoustic devices; acoustic resonators; acoustic transducers; microelectromechanical devices
Funding
- Agency for Science, Technology and Research (A*STAR)
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This paper reports an acoustic microelectro-mechanical system (MEMS) resonator structure that features dual-resonant response at 180 and 500 MHz. The MEMS structureuses aluminumnitride as acoustic layer and electrodes with dual design that provide dual-resonance behavior. Each resonant mode operates at the first symmetrical Lamb-wave mode (S0). Due to the large frequency separation between modes, device exhibits differentiated temperature coefficient of frequency) for each mode, which makes this structure suitable for thermometric beat frequency sensing. Reported devices are thus capable to multiply the 20-ppm/degrees C thermal sensitivity of the individual sensors by one order of magnitude, up to -334 ppm/degrees C for the thermometric beat frequency sensor.
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