Journal
SOFTWAREX
Volume 12, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.softx.2020.100605
Keywords
Monte Carlo simulation; Electron scattering; GPU; SEM; Lithography; Metrology
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Monte Carlo simulations are frequently used to describe electron-matter interaction in the 0-50 key energy range. It often takes hours to simulate electron microscope images using first-principle physical models. In an attempt to maintain a reasonable speed, empirical models are sometimes used. We present an open-source software package with first-principle physical models, which can run on GPUs for fast results. Typical electron microscope images can be obtained in minutes instead of hours on consumer-grade hardware, without any loss of accuracy. (C) 2020 The Author(s). Published by Elsevier B.V.
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