Journal
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
Volume 23, Issue 5, Pages -Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2017.2684540
Keywords
Aluminum-doped ZnO nanosheet; photodetector; aqueous solution method
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Funding
- Ministry of Science and Technology [MOST 104-2221-150-042, MOST 103-2221-E-150-034]
- National Science Council of Taiwan [NSC 102-2221-E-150-046, NSC 101-2221-E-150-043]
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We demonstrated the fabrication of Al-doped ZnO (AZO) nanosheets on a glass substrate using the aqueous solution method. AZO nanosheets for a metal-semiconductor-metal ultraviolet (UV) photodetector (PD) were prepared. The average length and diameter of the AZO nanosheets were 1.44 mu m and approximately 25 nm, respectively. The EDX spectrum of the Al-doped sample indicates that it contains approximately 0.64% at% Al. Our results show the high sensitivity of the UV PD, which reached 5.98 x 105. The measured transient response time and recovery time were 0.7 and 2.5 s, respectively.
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