4.5 Article

Enhanced activation of Mg ion-implanted GaN at decreasing annealing temperature by prolonging duration

Journal

APPLIED PHYSICS EXPRESS
Volume 14, Issue 1, Pages -

Publisher

IOP PUBLISHING LTD

Keywords

GaN; transmission electron microscopy; crystallographic defects; power device

Funding

  1. MEXT Program for research and development of next-generation semiconductor to realize energy-saving society [JPJ005357]
  2. Polish National Science Centre [2018/29/B/ST5/00338]

Ask authors/readers for more resources

Investigation into defect time-evolution in Mg ion-implanted GaN revealed that annealing at 1573 K for an unprecedentedly long duration resulted in a significant reduction in defects inhibiting Mg activation. Additionally, the cathodoluminescence intensity of donor-acceptor pair originating from Mg acceptors increased with duration, indicating the potential to lower annealing temperature by prolonging duration. These findings suggest practical annealing technology for Mg ion-implanted GaN.
Defect time-evolution was investigated in Mg ion-implanted GaN after annealing at 1573 K for an unprecedentedly long duration. Transmission electron microscopy directly revealed that annealing for over 30 min reduced defects inhibiting Mg activation, just like annealing at 1753 K for a short duration. The cathodoluminescence intensity of donor-acceptor pair originating from Mg acceptors increased as the duration increased, and the intensity after annealing for 60 min was higher than after short-duration annealing at 1753 K. These show the potential of lowering the annealing temperature by prolonging the duration, which would lead to practical annealing technology for Mg ion-implanted GaN.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.5
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available