Journal
ACOUSTICAL PHYSICS
Volume 67, Issue 1, Pages 38-46Publisher
PLEIADES PUBLISHING INC
DOI: 10.1134/S1063771021010024
Keywords
surface acoustic wave; bulk acoustic wave; Lamb wave; single-crystal diamond; aluminum nitride; piezoelectric layered structure
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Funding
- Russian Science Foundation [16-12-10293-P]
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The authors conducted an experimental and theoretical study on the propagation of surface acoustic waves (SAW) and Lamb waves in Me-IDT/AlN/(100) diamond piezoelectric layered structures, finding that the quality factor of Lamb waves significantly increases with frequency.
The authors have carried out an experimental and theoretical study of the propagation of surface acoustic waves (SAW)-Rayleigh, Sezawa and SH-modes, as well as Lamb waves in Me-IDT/AlN/(100) diamond (Me = Pt, Al) piezoelectric layered structures with a SAW resonator configuration. The types of modes are identified and the dispersion curves of the phase velocities and electromechanical coupling coefficients for SAW and Lamb waves are obtained. The excitation of Lamb waves up to a frequency of 7.3 GHz was observed experimentally. The resonance curves for Lamb waves have a higher quality factor Q compared to surface acoustic waves propagating on the same substrates. At a frequency of about 7 GHz, the loaded Q-factor reaches 3400, while the quality parameter Q x f = 2.4 x 10(13) Hz. An unusual effect of a significant increase in the Q-factor of Lamb waves with the frequency increasing from 760 at 1.5 GHz to 3400 at 7 GHz is noted.
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