Journal
CHEMICAL SOCIETY REVIEWS
Volume 50, Issue 6, Pages 3889-3956Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/d0cs00156b
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Funding
- Natural Science and Engineering Research Council of Canada (NSERC)
- Canada Research Chair Program (CRC)
- Canada Foundation for Innovation (CFI)
- Mitacs
- University of Western Ontario (UWO)
- Mitacs Elevate Postdoctoral Fellowship
- NSERC
- CFI
- BC Knowledge Development Fund (BCKDF)
- University of British Columbia (UBC)
- U.S. Department of Energy (DOE), Office of Energy Efficiency and Renewable Energy, Vehicle Technologies Office
- DOE Office of Science [DE-AC02-06CH11357]
- Ontario Research Fund (ORF)
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Energy storage and conversion systems play vital roles in reducing fossil fuel usage and developing electric vehicles. ALD and MLD techniques, with precise thickness control and excellent uniformity, have emerged as powerful tools for surface and interface engineering in energy-related devices. These techniques offer great potential for the development of new materials and advancements in the field of renewable energy.
Energy storage and conversion systems, including batteries, supercapacitors, fuel cells, solar cells, and photoelectrochemical water splitting, have played vital roles in the reduction of fossil fuel usage, addressing environmental issues and the development of electric vehicles. The fabrication and surface/interface engineering of electrode materials with refined structures are indispensable for achieving optimal performances for the different energy-related devices. Atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques, the gas-phase thin film deposition processes with self-limiting and saturated surface reactions, have emerged as powerful techniques for surface and interface engineering in energy-related devices due to their exceptional capability of precise thickness control, excellent uniformity and conformity, tunable composition and relatively low deposition temperature. In the past few decades, ALD and MLD have been intensively studied for energy storage and conversion applications with remarkable progress. In this review, we give a comprehensive summary of the development and achievements of ALD and MLD and their applications for energy storage and conversion, including batteries, supercapacitors, fuel cells, solar cells, and photoelectrochemical water splitting. Moreover, the fundamental understanding of the mechanisms involved in different devices will be deeply reviewed. Furthermore, the large-scale potential of ALD and MLD techniques is discussed and predicted. Finally, we will provide insightful perspectives on future directions for new material design by ALD and MLD and untapped opportunities in energy storage and conversion.
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