Journal
OPTO-ELECTRONIC ADVANCES
Volume 4, Issue 4, Pages -Publisher
CHINESE ACAD SCI, INST OPTICS & ELECTRONICS, ED OFF OPTO-ELECTRONIC ADV
DOI: 10.29026/oea.2021.200061
Keywords
flexible pressure sensor; piezoresistive sensor; microstructure; laser processing
Categories
Funding
- National Natural Science Foundation of China [51922092, 51705439]
- Domain Foundation of Equipment Advance Research of 13th Five-year Plan [JZX7Y20190243000801]
- Natural Science Foundation of Fujian Province of China [2017J06015]
- Science and Technology Plan Project of Xiamen City [3502Z20173024]
- Fundamental Research Funds for the Central Universities [20720200068]
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Using LDW method to fabricate flexible piezoresistive sensors on PDMS/MWCNTs composites with microstructures, microcones with excellent performance are obtained, showing high sensitivity, wide detection range, and good stability, which can be applied for LED brightness controlling, pulse detection, and voice recognition.
Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/ MWCNTs composites with an 8% MWCNTs mass fraction. By controlling laser energy, microstructures with different geometries can be obtained, which significantly impacts the performances of the sensors. Subsequently, curved microcones with excellent performance are fabricated under parameters of f = 40 kHz and v = 150 mm.s(-1). The sensor exhibits continuous multi-linear sensitivity, ultrahigh original sensitivity of 21.80 % kPa(-1), wide detection range of over 20 kPa, response/recovery time of similar to 100 ms and good cycle stability for more than 1000 times. Besides, obvious resistance variation can be observed when tiny pressure (a peanut of 30 Pa) is applied. Finally, the flexible piezoresistive sensor can be applied for LED brightness controlling, pulse detection and voice recognition.
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